Thermally driven metal-assisted chemical etching of GaAs with in-position and out-of-position catalyst

Title
Thermally driven metal-assisted chemical etching of GaAs with in-position and out-of-position catalyst
Authors
Keywords
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Journal
Journal of Materials Chemistry A
Volume 2, Issue 48, Pages 20481-20485
Publisher
Royal Society of Chemistry (RSC)
Online
2014-10-18
DOI
10.1039/c4ta05095a

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