Defect-free surface of quartz glass polished in elastic mode by chemical impact reaction

Title
Defect-free surface of quartz glass polished in elastic mode by chemical impact reaction
Authors
Keywords
defect-free surface, chemical impact reaction, nanoparticle jet polishing, elastic mode
Journal
Journal of Central South University
Volume 21, Issue 12, Pages 4438-4444
Publisher
Springer Nature
Online
2014-12-23
DOI
10.1007/s11771-014-2446-x

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