Defect-free surface of quartz glass polished in elastic mode by chemical impact reaction

标题
Defect-free surface of quartz glass polished in elastic mode by chemical impact reaction
作者
关键词
defect-free surface, chemical impact reaction, nanoparticle jet polishing, elastic mode
出版物
Journal of Central South University
Volume 21, Issue 12, Pages 4438-4444
出版商
Springer Nature
发表日期
2014-12-23
DOI
10.1007/s11771-014-2446-x

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