Thermo-elastic damping in a functionally graded piezoelectric micro-resonator

Title
Thermo-elastic damping in a functionally graded piezoelectric micro-resonator
Authors
Keywords
Thermo-elastic damping, Functionally graded piezoelectric, Micro-beam, Quality factor, MEMS
Journal
Publisher
Springer Nature
Online
2014-10-27
DOI
10.1007/s10999-014-9285-7

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