Thermo-elastic damping in a functionally graded piezoelectric micro-resonator

标题
Thermo-elastic damping in a functionally graded piezoelectric micro-resonator
作者
关键词
Thermo-elastic damping, Functionally graded piezoelectric, Micro-beam, Quality factor, MEMS
出版物
出版商
Springer Nature
发表日期
2014-10-27
DOI
10.1007/s10999-014-9285-7

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