Influence of pulse poling on the piezoelectric property of Pb(Zr0.52,Ti0.48)O3 thin films

Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

(2013) Hirofumi Nogami et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

Effects of Bipolar Pulse Poling on the Ferroelectric and Piezoelectric Properties of Tetragonal Composition Pb(Zr0.3,Ti0.7)O3Thin Films on Microelectromechanical Systems Microcantilevers

(2013) Takeshi Kobayashi et al.   JAPANESE JOURNAL OF APPLIED PHYSICS

A piezoelectric cantilever-type differential pressure sensor for a low standby power trigger switch

(2013) Yutaka Tomimatsu et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

An electrostatic field sensor operated by self-excited vibration of MEMS-based self-sensitive piezoelectric microcantilevers

(2013) T. Kobayashi et al.   SENSORS AND ACTUATORS A-PHYSICAL

Piezoelectric MEMS switch to activate event-driven wireless sensor nodes

(2013) H Nogami et al.   Smart Materials and Structures

Atomic-scale mechanisms of ferroelastic domain-wall-mediated ferroelectric switching

(2013) Peng Gao et al.   Nature Communications

Three-dimensional micro electromechanical system piezoelectric ultrasound transducer

(2012) Arman Hajati et al.   APPLIED PHYSICS LETTERS

Development of piezoelectric microcantilever flow sensor with wind-driven energy harvesting capability

(2012) Huicong Liu et al.   APPLIED PHYSICS LETTERS

The significance of the piezoelectric coefficient d31,eff determined from cantilever structures

(2012) M Dekkers et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased Output Power

(2011) Huicong Liu et al.   JOURNAL OF MICROELECTROMECHANICAL SYSTEMS

A digital output piezoelectric accelerometer using a Pb(Zr, Ti)O3thin film array electrically connected in series

(2010) T Kobayashi et al.   Smart Materials and Structures

Low speed piezoelectric optical microscanner actuated by piezoelectric microcantilevers using LaNiO3buffered Pb(Zr,Ti)O3thin film

(2009) T Kobayashi et al.   Smart Materials and Structures

A fatigue test method for Pb(Zr,Ti)O3thin films by using MEMS-based self-sensitive piezoelectric microcantilevers

(2008) T Kobayashi et al.   JOURNAL OF MICROMECHANICS AND MICROENGINEERING

Deflection of wafers and cantilevers with Pt/LNO/PZT/LNO/Pt/Ti/SiO2 multilayered structure

(2007) Takeshi Kobayashi et al.   THIN SOLID FILMS