Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 11, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/18/11/115007
Keywords
-
Ask authors/readers for more resources
In the present study, we propose a new method for the fatigue test of lead zirconate titanate (PZT) thin films for MEMS devices by using self-sensitive piezoelectric microcantilevers developed in our previous study. We have deposited PZT thin films on SOI wafers and fabricated the microcantilevers through the MEMS microfabrication process. In the self-sensitive piezoelectric microcantilevers, the PZT thin films are separated in order to act as an actuator and a sensor. The fatigue characteristic of the PZT thin films can be evaluated by measuring the output voltage of the sensor as a function of time. When a sine wave of 20 V(pp) and a dc bias of 10 V were applied to the PZT thin films for an actuator, the output voltage of the sensor fell down after 10(7) fatigue cycles. We have also investigated the influence of amplitude of the actuation sine wave and dc bias on the fatigue of the PZT thin films by using the proposed fatigue test method.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available