Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices

Published 2013 View Full Article

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Title
Impact of Reflow on the Output Characteristics of Piezoelectric Microelectromechanical System Devices
Authors
Keywords
-
Journal
JAPANESE JOURNAL OF APPLIED PHYSICS
Volume 51, Issue 9S1, Pages 09LD11
Publisher
Japan Society of Applied Physics
Online
2013-12-21
DOI
10.7567/jjap.51.09ld11

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