Atomic layer deposition of high-density Pt nanodots on Al2O3 film using (MeCp)Pt(Me)3 and O2 precursors for nonvolatile memory applications

Published 2013 View Full Article

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Title
Atomic layer deposition of high-density Pt nanodots on Al2O3 film using (MeCp)Pt(Me)3 and O2 precursors for nonvolatile memory applications
Authors
Keywords
Atomic layer deposition, Pt nanodots, Nonvolatile memory
Journal
Nanoscale Research Letters
Volume 8, Issue 1, Pages 80
Publisher
Springer Nature
Online
2013-02-15
DOI
10.1186/1556-276x-8-80
References
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