Structure and photoluminescence of the TiO2 films grown by atomic layer deposition using tetrakis-dimethylamino titanium and ozone

Title
Structure and photoluminescence of the TiO2 films grown by atomic layer deposition using tetrakis-dimethylamino titanium and ozone
Authors
Keywords
Atomic layer deposition, Titanium dioxide, Photoluminescence, Crystal structure, Defects, XPS, 81.15.Gh, 72.20.Jv, 78.20.Ci
Journal
Nanoscale Research Letters
Volume 10, Issue 1, Pages -
Publisher
Springer Nature
Online
2015-02-27
DOI
10.1186/s11671-015-0790-x

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