Structure and photoluminescence of the TiO2 films grown by atomic layer deposition using tetrakis-dimethylamino titanium and ozone

标题
Structure and photoluminescence of the TiO2 films grown by atomic layer deposition using tetrakis-dimethylamino titanium and ozone
作者
关键词
Atomic layer deposition, Titanium dioxide, Photoluminescence, Crystal structure, Defects, XPS, 81.15.Gh, 72.20.Jv, 78.20.Ci
出版物
Nanoscale Research Letters
Volume 10, Issue 1, Pages -
出版商
Springer Nature
发表日期
2015-02-27
DOI
10.1186/s11671-015-0790-x

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