A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS)

标题
A review comparing cathodic arcs and high power impulse magnetron sputtering (HiPIMS)
作者
关键词
-
出版物
SURFACE & COATINGS TECHNOLOGY
Volume 257, Issue -, Pages 308-325
出版商
Elsevier BV
发表日期
2014-09-02
DOI
10.1016/j.surfcoat.2014.08.043

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