Kinetics of plasma species and their ionization in short-HiPIMS by particle modeling

Published 2013 View Full Article

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Title
Kinetics of plasma species and their ionization in short-HiPIMS by particle modeling
Authors
Keywords
-
Journal
SURFACE & COATINGS TECHNOLOGY
Volume 255, Issue -, Pages 52-61
Publisher
Elsevier BV
Online
2013-12-06
DOI
10.1016/j.surfcoat.2013.11.050

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