Room temperature deposition of sputtered TiN films for superconducting coplanar waveguide resonators
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Title
Room temperature deposition of sputtered TiN films for superconducting coplanar waveguide resonators
Authors
Keywords
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Journal
SUPERCONDUCTOR SCIENCE & TECHNOLOGY
Volume 27, Issue 1, Pages 015009
Publisher
IOP Publishing
Online
2013-12-05
DOI
10.1088/0953-2048/27/1/015009
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