Antireflection Behavior of Multidimensional Nanostructures Patterned Using a Conformable Elastomeric Phase Mask in a Single Exposure Step

Published 2010 View Full Article

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Title
Antireflection Behavior of Multidimensional Nanostructures Patterned Using a Conformable Elastomeric Phase Mask in a Single Exposure Step
Authors
Keywords
-
Journal
Small
Volume 6, Issue 18, Pages 1981-1985
Publisher
Wiley
Online
2010-08-17
DOI
10.1002/smll.201000275
References
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