Antireflection Behavior of Multidimensional Nanostructures Patterned Using a Conformable Elastomeric Phase Mask in a Single Exposure Step

标题
Antireflection Behavior of Multidimensional Nanostructures Patterned Using a Conformable Elastomeric Phase Mask in a Single Exposure Step
作者
关键词
-
出版物
Small
Volume 6, Issue 18, Pages 1981-1985
出版商
Wiley
发表日期
2010-08-17
DOI
10.1002/smll.201000275

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