Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process

Micromachined Catalytic Combustible Hydrogen Gas Sensor Based on Nano-structured SnO2

(2013) Xifeng Liu et al.   ACTA CHIMICA SINICA

Sensor for Thermal Gas Analysis Based on Micromachined Silicon-Microwires

(2013) Kurt Kliche et al.   IEEE SENSORS JOURNAL

Fabrication of a graphene field effect transistor array on microchannels for ethanol sensing

(2011) Bangdao Chen et al.   APPLIED SURFACE SCIENCE

Room temperature gas detection using silicon nanowires

(2011) Rakesh K. Joshi et al.   Materials Today

Enhanced H2S sensing characteristics of Pt doped SnO2 nanofibers sensors with micro heater

(2011) Ki-Young Dong et al.   SENSORS AND ACTUATORS B-CHEMICAL

Integration of ZnO nanostructures with MEMS for ethanol sensor

(2011) H.J. Pandya et al.   SENSORS AND ACTUATORS B-CHEMICAL

Fabrication and Characterization of CMOS-MEMS Thermoelectric Micro Generators

(2010) Pin-Hsu Kao et al.   SENSORS

Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip

(2010) Ming-Zhi Yang et al.   SENSORS

Gas sensing properties of single crystalline porous silicon nanowires

(2009) Kui-Qing Peng et al.   APPLIED PHYSICS LETTERS

Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique

(2009) Mao-Chen Liu et al.   SENSORS

Fabrication and Characterization of a Tunable In-plane Resonator with Low Driving Voltage

(2009) Pin-Hsu Kao et al.   SENSORS