Fabrication and Characterization of a Tunable In-plane Resonator with Low Driving Voltage

Title
Fabrication and Characterization of a Tunable In-plane Resonator with Low Driving Voltage
Authors
Keywords
-
Journal
SENSORS
Volume 9, Issue 3, Pages 2062-2075
Publisher
MDPI AG
Online
2009-03-19
DOI
10.3390/s90302062

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