Sensor for Thermal Gas Analysis Based on Micromachined Silicon-Microwires

Published 2013 View Full Article

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Title
Sensor for Thermal Gas Analysis Based on Micromachined Silicon-Microwires
Authors
Keywords
-
Journal
IEEE SENSORS JOURNAL
Volume 13, Issue 7, Pages 2626-2635
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2013-03-16
DOI
10.1109/jsen.2013.2252008

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