Fabrication and Characterization of Polyaniline/PVA Humidity Microsensors

High-performance capacitive humidity sensor with novel electrode and polyimide layer based on MEMS technology

(2010) Ji-Hong Kim et al.   MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS

Microhotplate-Based High-Speed Polyimide Capacitive Humidity Sensors

(2010) Myong Jin Lee et al.   Sensor Letters

Polypyrrole Porous Micro Humidity Sensor Integrated with a Ring Oscillator Circuit on Chip

(2010) Ming-Zhi Yang et al.   SENSORS

Miniature humidity micro-sensor based on organic conductive polymer – poly(3,4-ethylenedioxythiophene)

(2009) L. Li et al.   Micro & Nano Letters

Miniaturised multi-MEMS sensor development

(2009) Mathieu Hautefeuille et al.   MICROELECTRONICS RELIABILITY

Manufacture of a Polyaniline Nanofiber Ammonia Sensor Integrated with a Readout Circuit Using the CMOS-MEMS Technique

(2009) Mao-Chen Liu et al.   SENSORS

Technologies for Cofabricating MEMS and Electronics

(2008) G.K. Fedder et al.   PROCEEDINGS OF THE IEEE

MEMS-based humidity sensor with integrated temperature compensation mechanism

(2008) Lung-Tai Chen et al.   SENSORS AND ACTUATORS A-PHYSICAL