Microhotplate-Based High-Speed Polyimide Capacitive Humidity Sensors

Published 2010 View Full Article

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Title
Microhotplate-Based High-Speed Polyimide Capacitive Humidity Sensors
Authors
Keywords
-
Journal
Sensor Letters
Volume 7, Issue 4, Pages 517-522
Publisher
American Scientific Publishers
Online
2010-04-02
DOI
10.1166/sl.2009.1102

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