Technologies for Cofabricating MEMS and Electronics

Published 2008 View Full Article

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Title
Technologies for Cofabricating MEMS and Electronics
Authors
Keywords
-
Journal
PROCEEDINGS OF THE IEEE
Volume 96, Issue 2, Pages 306-322
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Online
2008-01-17
DOI
10.1109/jproc.2007.911064

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