A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme

Published 2009 View Full Article

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Title
A MEMS-Based Flow Rate and Flow Direction Sensing Platform with Integrated Temperature Compensation Scheme
Authors
Keywords
-
Journal
SENSORS
Volume 9, Issue 7, Pages 5460-5476
Publisher
MDPI AG
Online
2009-07-10
DOI
10.3390/s90705460
References
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