Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels

Published 2007 View Full Article

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Title
Miniaturized thermal flow sensor with planar-integrated sensor structures on semicircular surface channels
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 143, Issue 1, Pages 1-6
Publisher
Elsevier BV
Online
2007-12-28
DOI
10.1016/j.sna.2007.12.005

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