Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists

Published 2009 View Full Article

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Title
Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists
Authors
Keywords
-
Journal
SENSORS
Volume 9, Issue 8, Pages 6200-6218
Publisher
MDPI AG
Online
2009-08-06
DOI
10.3390/s90806200
References
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