Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists

标题
Fabrication and Performance of MEMS-Based Pressure Sensor Packages Using Patterned Ultra-Thick Photoresists
作者
关键词
-
出版物
SENSORS
Volume 9, Issue 8, Pages 6200-6218
出版商
MDPI AG
发表日期
2009-08-06
DOI
10.3390/s90806200

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