A novel plastic package for pressure sensors fabricated using the lithographic dam-ring approach

Title
A novel plastic package for pressure sensors fabricated using the lithographic dam-ring approach
Authors
Keywords
-
Journal
SENSORS AND ACTUATORS A-PHYSICAL
Volume 149, Issue 1, Pages 165-171
Publisher
Elsevier BV
Online
2008-11-08
DOI
10.1016/j.sna.2008.10.012

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