Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip

Published 2009 View Full Article

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Title
Capacitive Micro Pressure Sensor Integrated with a Ring Oscillator Circuit on Chip
Authors
Keywords
-
Journal
SENSORS
Volume 9, Issue 12, Pages 10158-10170
Publisher
MDPI AG
Online
2009-12-14
DOI
10.3390/s91210158
References
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