High-performance poly-silicon TFTs with high-kY2O3gate dielectrics

Title
High-performance poly-silicon TFTs with high-kY2O3gate dielectrics
Authors
Keywords
-
Journal
SEMICONDUCTOR SCIENCE AND TECHNOLOGY
Volume 26, Issue 7, Pages 075004
Publisher
IOP Publishing
Online
2011-04-01
DOI
10.1088/0268-1242/26/7/075004

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