High-Performance Polysilicon TFTs Using Stacked $ \hbox{Pr}_{2}\hbox{O}_{3}$/Oxynitride Gate Dielectric

Authors

Keywords

Journal

Volume 29, Issue 4, Pages 353-356

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Online

2008-03-28

DOI

10.1109/led.2008.917119

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