Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate

Title
Direct Growth and Controlled Coalescence of Thick AlN Template on Micro-circle Patterned Si Substrate
Authors
Keywords
-
Journal
Scientific Reports
Volume 5, Issue -, Pages 14734
Publisher
Springer Nature
Online
2015-10-06
DOI
10.1038/srep14734

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