Effect of multiple AlN layers on quality of GaN films grown on Si substrates

Published 2014 View Full Article

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Title
Effect of multiple AlN layers on quality of GaN films grown on Si substrates
Authors
Keywords
GaN, AlN, Si, MOCVD
Journal
Electronic Materials Letters
Volume 10, Issue 6, Pages 1063-1067
Publisher
Springer Nature
Online
2014-11-21
DOI
10.1007/s13391-014-3164-0
References
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