Control of ion energy distributions using a pulsed plasma with synchronous bias on a boundary electrode

Published 2011 View Full Article

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Title
Control of ion energy distributions using a pulsed plasma with synchronous bias on a boundary electrode
Authors
Keywords
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Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 20, Issue 5, Pages 055001
Publisher
IOP Publishing
Online
2011-08-11
DOI
10.1088/0963-0252/20/5/055001
References
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