Tailored ion energy distributions at an rf-biased plasma electrode

Published 2010 View Full Article

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Title
Tailored ion energy distributions at an rf-biased plasma electrode
Authors
Keywords
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Journal
PLASMA SOURCES SCIENCE & TECHNOLOGY
Volume 19, Issue 6, Pages 065014
Publisher
IOP Publishing
Online
2010-11-17
DOI
10.1088/0963-0252/19/6/065014
References
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