Thermal Stability and Phase Transformations ofγ-/Amorphous-Al2O3Thin Films

Published 2009 View Full Article

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Title
Thermal Stability and Phase Transformations ofγ-/Amorphous-Al2O3Thin Films
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume 6, Issue S1, Pages S907-S911
Publisher
Wiley
Online
2009-03-17
DOI
10.1002/ppap.200932301
References
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