Thermal Stability and Phase Transformations ofγ-/Amorphous-Al2O3Thin Films

标题
Thermal Stability and Phase Transformations ofγ-/Amorphous-Al2O3Thin Films
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 6, Issue S1, Pages S907-S911
出版商
Wiley
发表日期
2009-03-17
DOI
10.1002/ppap.200932301

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