Plasma-Assisted Atomic Layer Deposition of Al2O3at Room Temperature

Published 2009 View Full Article

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Title
Plasma-Assisted Atomic Layer Deposition of Al2O3at Room Temperature
Authors
Keywords
-
Journal
Plasma Processes and Polymers
Volume 6, Issue S1, Pages S237-S241
Publisher
Wiley
Online
2009-05-28
DOI
10.1002/ppap.200930605
References
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