Plasma-Assisted Atomic Layer Deposition of Al2O3at Room Temperature

标题
Plasma-Assisted Atomic Layer Deposition of Al2O3at Room Temperature
作者
关键词
-
出版物
Plasma Processes and Polymers
Volume 6, Issue S1, Pages S237-S241
出版商
Wiley
发表日期
2009-05-28
DOI
10.1002/ppap.200930605

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