Mechanism of Formation of Carbon–Vacancy Structures in Silicon Carbide during Its Growth by Atomic Substitution

Title
Mechanism of Formation of Carbon–Vacancy Structures in Silicon Carbide during Its Growth by Atomic Substitution
Authors
Keywords
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Journal
PHYSICS OF THE SOLID STATE
Volume 60, Issue 9, Pages 1891-1896
Publisher
Pleiades Publishing Ltd
Online
2018-09-06
DOI
10.1134/s1063783418090184

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