Theory and practice of SiC growth on Si and its applications to wide-gap semiconductor films

Title
Theory and practice of SiC growth on Si and its applications to wide-gap semiconductor films
Authors
Keywords
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Journal
JOURNAL OF PHYSICS D-APPLIED PHYSICS
Volume 47, Issue 31, Pages 313001
Publisher
IOP Publishing
Online
2014-07-08
DOI
10.1088/0022-3727/47/31/313001

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