Synthesis of epitaxial silicon carbide films through the substitution of atoms in the silicon crystal lattice: A review
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Title
Synthesis of epitaxial silicon carbide films through the substitution of atoms in the silicon crystal lattice: A review
Authors
Keywords
Silicon Carbide, Intermediate Substance, Silicon Vacancy, Elastic Dipole, Silicon Carbide Layer
Journal
PHYSICS OF THE SOLID STATE
Volume 56, Issue 8, Pages 1507-1535
Publisher
Pleiades Publishing Ltd
Online
2014-08-05
DOI
10.1134/s1063783414080137
References
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