Characteristics of probe current harmonics based on various applied voltage waveforms in low temperature plasmas

标题
Characteristics of probe current harmonics based on various applied voltage waveforms in low temperature plasmas
作者
关键词
-
出版物
PHYSICS OF PLASMAS
Volume 18, Issue 3, Pages 033508
出版商
AIP Publishing
发表日期
2011-03-26
DOI
10.1063/1.3570664

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