Spectroscopic study on rotational and vibrational temperature of N2 and N2+ in dual-frequency capacitively coupled plasma

Published 2008 View Full Article

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Title
Spectroscopic study on rotational and vibrational temperature of N2 and N2+ in dual-frequency capacitively coupled plasma
Authors
Keywords
-
Journal
PHYSICS OF PLASMAS
Volume 15, Issue 11, Pages 113504
Publisher
AIP Publishing
Online
2008-11-21
DOI
10.1063/1.3025826
References
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