Spectroscopic study on rotational and vibrational temperature of N2 and N2+ in dual-frequency capacitively coupled plasma

标题
Spectroscopic study on rotational and vibrational temperature of N2 and N2+ in dual-frequency capacitively coupled plasma
作者
关键词
-
出版物
PHYSICS OF PLASMAS
Volume 15, Issue 11, Pages 113504
出版商
AIP Publishing
发表日期
2008-11-21
DOI
10.1063/1.3025826

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