Influence of exciting frequency on gas and ion rotational temperatures of nitrogen capacitively coupled plasma

Published 2008 View Full Article

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Title
Influence of exciting frequency on gas and ion rotational temperatures of nitrogen capacitively coupled plasma
Authors
Keywords
-
Journal
PHYSICS OF PLASMAS
Volume 15, Issue 7, Pages 073501
Publisher
AIP Publishing
Online
2008-08-01
DOI
10.1063/1.2952838

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