Nanopatterning dynamics on Si(100) during oblique 40-keV Ar+erosion with metal codeposition: Morphological and compositional correlation
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Title
Nanopatterning dynamics on Si(100) during oblique 40-keV Ar+erosion with metal codeposition: Morphological and compositional correlation
Authors
Keywords
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Journal
PHYSICAL REVIEW B
Volume 86, Issue 8, Pages -
Publisher
American Physical Society (APS)
Online
2012-08-22
DOI
10.1103/physrevb.86.085436
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