In situ lift-out: Steps to improve yield and a comparison with other FIB TEM sample preparation techniques

Published 2008 View Full Article

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Title
In situ lift-out: Steps to improve yield and a comparison with other FIB TEM sample preparation techniques
Authors
Keywords
-
Journal
MICRON
Volume 39, Issue 8, Pages 1325-1330
Publisher
Elsevier BV
Online
2008-02-20
DOI
10.1016/j.micron.2008.02.006

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