Fabrication of subwavelength periodic nanostructures using liquid immersion Lloyd’s mirror interference lithography

Nanotextured Silica Surfaces with Robust Superhydrophobicity and Omnidirectional Broadband Supertransmissivity

(2012) Kyoo-Chul Park et al.   ACS Nano

Bio-inspired design of multiscale structures for function integration

(2011) Kesong Liu et al.   Nano Today

Stand-alone diamond binary phase transmission gratings for the EUV band

(2011) C. Braig et al.   OPTICS EXPRESS

Two degrees-of-freedom Lloyd–mirror interferometer for superior pattern coverage area

(2011) Ishan Wathuthanthri et al.   OPTICS LETTERS

Sub-50 nm patterning by immersion interference lithography using a Littrow prism as a Lloyd’s interferometer

(2010) Johannes de Boor et al.   OPTICS LETTERS

Immersion Lithography: Photomask and Wafer-Level Materials

(2009) Roger H. French et al.   Annual Review of Materials Research

Three-beam interference lithography: upgrading a Lloyd's interferometer for single-exposure hexagonal patterning

(2009) Johannes de Boor et al.   OPTICS LETTERS

A facile approach for artificial biomimetic surfaces with both superhydrophobicity and iridescence

(2009) Dong Wu et al.   Soft Matter

Linewidth uniformity in Lloyd’s mirror interference lithography systems

(2008) Thomas B. O’Reilly et al.   JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B

Blazed high-efficiency x-ray diffraction via transmission through arrays of nanometer-scale mirrors

(2008) Ralf K. Heilmann et al.   OPTICS EXPRESS

Fabrication of 50 nm period gratings with multilevel interference lithography

(2008) Chih-Hao Chang et al.   OPTICS LETTERS