High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths

标题
High-efficiency 5000 lines/mm multilayer-coated blazed grating for extreme ultraviolet wavelengths
作者
关键词
-
出版物
OPTICS LETTERS
Volume 35, Issue 15, Pages 2615
出版商
The Optical Society
发表日期
2010-07-29
DOI
10.1364/ol.35.002615

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