High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region

Published 2008 View Full Article

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Title
High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region
Authors
Keywords
-
Journal
OPTICS LETTERS
Volume 33, Issue 5, Pages 485
Publisher
The Optical Society
Online
2008-03-01
DOI
10.1364/ol.33.000485

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